This report lists the dissemination activities and successes regarding the MEMS development and integration, including a technical summary and a performance evaluation.

A Study of 355 Nm UV Laser Ablation Process for Singulation of Silicon Wafers published in 2025 25th European Microelectronics and Packaging Conference & Exhibition (EMPC)

Novel Multi Pixel-based Gas Sensor Fabricated by Local Inkjet Printing of Metal-oxides Structures published at Eurosensors 2025

Development of wafer singulation technique for MEMS and MOX gas sensors using 355 nm UV laser ablation process published at Eurosensors 2025

The Dimensionality of MOX Sensors in Air Quality assessment published at Eurosensors 2025

Deliverable D6.3, Report on User Needs for the Development of a Single Sensor, presents the outcomes of Task 6.5 within Work Package 6 of the AMUSENS project. Its primary objective is to identify and translate user needs, expectations, and challenges into actionable requirements for the development of a single multi-material sensor and its associated digital ecosystem. This user-centred evidence base supports a responsible and socially aligned technological development process, ensuring that the AMUSENS platform is technically robust, ethically grounded, and fit for real-world adoption across environmental and health-related applications.

Deliverable 6.2 presents the outcomes of Task 6.4, which focuses on developing AI-based tools to identify the most promising combinations of sensing materials and operating parameters for the AMUSENS multi-pixel gas sensor platform. The main objective of this work was to develop a set of tools capable of selecting optimal combinations of sensing materials and their operating parameters in order to maximize the ability to discriminate and detect individual target gases. Building on the database produced in Task 6.3, this deliverable introduces a complete methodological and software pipeline capable of transforming long raw time-series measurements into an AI-ready dataset, extracting meaningful features, and applying feature-selection strategies to rank sensing materials according to their contribution to gas discriminability.

This report describes the content of the Database of sensing materials and their sensing responses, which is produced within AMUSENS project to collect the references to all materials, samples and measurements performed during the project. The first version of the database is the result of WP5 and WP6, for which the materials, devices and measurements, where performed to assess the sensing performances of the various developed materials as a function of their characteristics. This is a document that will be completed all along the project to track all the produced samples and measurements. The database containing the metadata of the measurement with reference to measurement files is published on Zenodo repository under the DOI: 10.5281/zenodo.17881917.

The Project Quality Plan shows how quality aspects are taken into account in a variety of processes and activities within the AMUSENS project.

This deliverable contains the fourth and last version of the REALHOLO professional communication kit,
including several materials to raise awareness of the project, but also tools to continuously inform the
stakeholders about ongoing activities.

This final report will inform about the dissemination activities carried out during the project, including the
material produced and the events organized.